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Croissance et caractérisation de films ultra-minces d’oxydes de silicium formes sous bombardement électronique en surface du silicium(100).

Benafghoul, SEFSAF (D BOLMONT, 1989)

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Author
- Benafghoul, SEFSAF (1)
Subject
- bombardement électronique . (1)
- oxydes, silicium (1)
- ultra-minces (1)
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Date Issued
- 1989 (1)
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